Charged particle beam device probe operation
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United States of America Patent
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Jan 15, 2008
Grant Date -
Aug 31, 2006
app pub date -
Feb 23, 2005
filing date -
Feb 23, 2004
priority date (Note) -
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status (Latency Note)
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Abstract
An apparatus including a positioner control device, a measuring device and a control routine. The positioner control device is communicatively coupled to a chamber of a charged particle beam device (CPBD) and is configured to individually manipulate each of a plurality of probes within the CPBD chamber to establish contact between ones of the plurality of probes and corresponding ones of a plurality of contact points of a sample positioned in the CPBD chamber. The measuring device is communicatively coupled to the CPBD and the positioner control device and is configured to perform one of a measurement and a detection of a characteristic associated with one of the plurality of contact points. The control routine is configured to at least partially automate control of at least one of the CPBD, the positioner control device and the measuring device.
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